Farkas, Richárd (2003) Optinization of one- and two-dimenasional masks in the optical lithography. ['eprint_fieldopt_thesis_type_master' not defined] thesis, Szegedi Tudományegyetem.
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| Item Type: | Thesis (['eprint_fieldopt_thesis_type_master' not defined]) |
|---|---|
| Subjects: | 01. Natural sciences > 01.02. Computer and information sciences |
| Depositing User: | TTK szerkesztő |
| Date Deposited: | 10 Mar 2011 15:14 |
| Last Modified: | 14 Mar 2013 06:59 |
| URI: | https://diploma.bibl.u-szeged.hu/id/eprint/655 |
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