Optinization of one- and two-dimenasional masks in the optical lithography

Farkas, Richárd (2003) Optinization of one- and two-dimenasional masks in the optical lithography. Masters, Szegedi Tudományegyetem.

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Institution

Szegedi Tudományegyetem

Faculty

Faculty of Science and Mathematics

Department

Számítástudományi Tanszék

Discipline

Informatics

Institute

Informatikai Tanszékcsoport

Specialization

közgazdasági programozó matematikus

Supervisor(s)

Supervisor
Supervisor scientific name label
Email
EHA
Kókai, Gabriella
UNSPECIFIED
UNSPECIFIED
UNSPECIFIED
Tollkühn, Bernd
UNSPECIFIED
UNSPECIFIED
UNSPECIFIED
Erdmann, dr. Andreas
UNSPECIFIED
UNSPECIFIED
UNSPECIFIED

Item Type: Thesis (Masters)
Subjects: 01. Natural sciences > 01.02. Computer and information sciences
Depositing User: TTK szerkesztő
Date Deposited: 2011. Mar. 10. 15:14
Last Modified: 2013. Mar. 14. 06:59
URI: https://diploma.bibl.u-szeged.hu/id/eprint/655

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