Farkas, Richárd (2003) Optinization of one- and two-dimenasional masks in the optical lithography. ['eprint_fieldopt_thesis_type_master' not defined] thesis, Szegedi Tudományegyetem.
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| Item Type: | Thesis (['eprint_fieldopt_thesis_type_master' not defined]) |
|---|---|
| Institution: | Szegedi Tudományegyetem |
| ['eprint_fieldname_faculty' not defined]: | Faculty of Science and Mathematics |
| Department: | Számítástudományi Tanszék |
| ['eprint_fieldname_specialization' not defined]: | közgazdasági programozó matematikus |
| Discipline: | Informatics |
| Supervisor(s): | Supervisor Supervisor scientific name label Email EHA Kókai, Gabriella UNSPECIFIED UNSPECIFIED UNSPECIFIED Tollkühn, Bernd UNSPECIFIED UNSPECIFIED UNSPECIFIED Erdmann, dr. Andreas UNSPECIFIED UNSPECIFIED UNSPECIFIED |
| Subjects: | 01. Natural sciences > 01.02. Computer and information sciences |
| Depositing User: | TTK szerkesztő |
| Date Deposited: | 2011. Mar. 10. 15:14 |
| Last Modified: | 2013. Mar. 14. 06:59 |
| URI: | https://diploma.bibl.u-szeged.hu/id/eprint/655 |
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