Farkas, Richárd (2003) Optinization of one- and two-dimenasional masks in the optical lithography. Masters, Szegedi Tudományegyetem.
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Institution
Szegedi Tudományegyetem
Faculty
Faculty of Science and Mathematics
Department
Discipline
Institute
Informatikai Tanszékcsoport
Specialization
közgazdasági programozó matematikus
Supervisor(s)
Supervisor
Supervisor scientific name label
Email
EHA
Kókai, Gabriella
UNSPECIFIED
UNSPECIFIED
UNSPECIFIED
Tollkühn, Bernd
UNSPECIFIED
UNSPECIFIED
UNSPECIFIED
Erdmann, dr. Andreas
UNSPECIFIED
UNSPECIFIED
UNSPECIFIED
Item Type: | Thesis (Masters) |
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Subjects: | 01. Natural sciences > 01.02. Computer and information sciences |
Depositing User: | TTK szerkesztő |
Date Deposited: | 2011. Mar. 10. 15:14 |
Last Modified: | 2013. Mar. 14. 06:59 |
URI: | https://diploma.bibl.u-szeged.hu/id/eprint/655 |
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